What is CeramiCoat™?

Ceramic coating applied by a plasma spray process
    – Coating material is alumina (AlO)
    – Trademarked

Typical application
    – Coat inner surface of quartz bell jar

Principal advantage
    – Longer kit life because thicker deposition can accumulate before failure

Why Use CeramiCoat™?

CeramiCoat™ modifies the quartz surface to extend bell jar life
    – Deposited material sticks better

Alumina coating material has good properties for pre-clean chambers
    – Strong adhesion to quartz
    – High purity
    – High vacuum compatible
    – Higher electrical resistivity than quartz
         – Rf compatible
    – High temperature material (melting point 2070 °C)