Tosoh SET's objective is to optimize our customer's process kit performance. Longer kit life, lower particle counts and shorter PM Cycles are routinely achieved by those customers using the program.

To that end, Tosoh SET addresses virtually every aspect of process kits—from design to manufacture, from surface processing to cleaning, from incoming metrology to final cleanroom assembly and QC. In the entire industry, only Tosoh SET possesses the in-depth process kit expertise, advanced process equipment and world class facilities that are necessary to achieve our stringent customer requirements in the semiconductor industry.