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Tosoh SET views process kits
with the same objectivity and concern as you, the end user. Tosoh
SET takes responsibility for optimizing both the performance and management
of the industry's process kits. This responsibility is clearly shown
in our kit components, program features, and services. |
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PVD Shielding
- 100% Mechanical Inspection
- Advanced Surface Treatment
- Class 100, Ultrasonic Cleaning
- Subassembly of Shield Components
- "PM in a Box" includes all shielding,
hardware and consumables
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Cu/Ta SIP® Kits
- Ti,Ta,Cu Kits
- 100% Mechanical Inspection of Shields
- Arc Sprayed Ceramics for improved performance
- Class 100, Ultrasonic Cleaning
- Customized Shipping container for kit transport
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Vectra IMP®
- 100% mechanical inspection of shields and hardware
- Arc Sprayed Ceramics for improved performance
- Class 100, Ultrasonic Cleaning
- Full Assembly of bowl shield with high purity coils
- Customized Shipping Container for kit transport
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CVD Kits
- WxZ®, TxZ® and HP+ Chamber Kits
- 100% mechanical inspection of shields and hardware
- Advance Surface treatment including arc spray and annodization
- Proprietary resurfacing of heater surface for extended life
- Subassembly of critical shield components
- Customized Shipping Container for kit transport
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PCII Chamber Kits
- PCII, PIK2 and Advanced PIK2 Chamber Kits
- 100% mechanical inspection of shields and Quartz components
- Replacement of antenna dowels and clips with each refurbishment
- Helium Leak check of bell jar after processing
- Customized shipping container for
kit transport
- CeramiCoat™ Bell Jar Processing
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CMP Retaining Rings
- 50% price reduction over OEM Rings
- Extended ring life from enhanced PPS material and PPS processing
- Refurbishment program using patented mechanical interface for
PPS ring and SS ring. No Epoxy used!
- Ten day refurbishment cycle reduced ring inventory
- Custom Design Capabilities
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Etch Process Kit
- AMAT & LAM Process Kits under development
- 100% Inspection of all shields and components
- Subassembly of critical kit components
- Class 100, Ultrasonic Cleaning of all shields
- Customized Shipping container for kit transport
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CeramiCoat™ is a trademark of Tosoh SET. Vectra IMP®, TxZ®,
WxZ®and SIP®are trademarks or registered trademarks of Applied
Materials. |
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