At Tosoh SET we have developed an extensive database and inventory of quality replacement shields for the semiconductor industry. For years we have been producing PVD and CVD Shielding, CMP Retaining Rings, and Chamber Hardware to support the Tosoh SET PKM program. We now offer these high quality shields and components to the industry as Precision Replacement Parts. Most, at a fraction of OEM pricing.

One hundred percent of Tosoh SET Precision Replacement Parts originate from a stringent reverse engineering process in our Dublin, CA facility. You can purchase an OEM equivalent product from our extensive database, with delivery typically within 2-4 weeks. Or, customers can take advantage of numerous custom Tosoh SET components designed to improve chamber performance. Simply contact Tosoh SET with your individual requirements for optimized components. In either case you can be sure Tosoh SET's recognized quality is built into every part.

As you search our database, Tosoh SET will highlight the various shield options for you.

Should you fail to locate your exact component, or desire to speak with Tosoh SET Technical Support to pursue customized products, please Contact Tosoh SET for further assistance.