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Optimized surface treatment of process chamber components is critical
in achieving superior process kit performance. Tosoh SET pioneered
the use of CNC grit blasting and arc spraying for component surface
treatment to ensure uniform surface conditions within a part and
repeatable surface conditions from part to part. In addition, Tosoh
SET has characterized arc spray films with respect to thickness
and roughness to optimize adhesion of deposited films.
This superior level of consistency in surface texture and optimized film characteristics
results in superior kit performance. This is clearly demonstrated in the graphs
below, which compare an arc spray film supplied by a standard cleaning company
to a kit refurbished and arc sprayed by Tosoh SET.
Tosoh SET CeramiCoat
trademarked plasma sprayed ceramic coating
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