Optimized surface treatment of process chamber components is critical in achieving superior process kit performance. Tosoh SET pioneered the use of CNC grit blasting and arc spraying for component surface treatment to ensure uniform surface conditions within a part and repeatable surface conditions from part to part. In addition, Tosoh SET has characterized arc spray films with respect to thickness and roughness to optimize adhesion of deposited films.

This superior level of consistency in surface texture and optimized film characteristics results in superior kit performance. This is clearly demonstrated in the graphs below, which compare an arc spray film supplied by a standard cleaning company to a kit refurbished and arc sprayed by Tosoh SET.

Tosoh SET CeramiCoat™
trademarked plasma sprayed ceramic coating