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Process Kits for the Semiconductor Industry












 

PKM Technology

S U R F A C E   T E X T U R I N G
 
 


Optimized surface treatment of process chamber components is critical in achieving superior process kit performance. TSET pioneered the use of CNC grit blasting and arc spraying for component surface treatment to ensure uniform surface conditions within a part and repeatable surface conditions from part to part. In addition, TSET has characterized arc spray films with respect to thickness and roughness to optimize adhesion of deposited films.

This superior level of consistency in surface texture and optimized film characteristics results in superior kit performance. This is clearly demonstrated in the graphs below, which compare an arc spray film supplied by a standard cleaning company to a kit refurbished and arc sprayed by TSET.

TSET CeramiCoat
trademarked plasma sprayed ceramic coating

Tosoh SET Surface Texturing - Arc Spray and Grit Blasting
   
Graph showing Increased kWhr Kit Lifetimes
Graph showing Particle Reductions

 

CeramiCoat™ ia a trademark of TSET.

 

   
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